Normal view
MARC view
- Microelectronics Fabrications
Entry Topical Term
001 - CONTROL NUMBER
- control field: 49163
003 - CONTROL NUMBER IDENTIFIER
- control field: OSt
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20250721105246.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 250721|| aca||aabn | a|a d
040 ## - CATALOGING SOURCE
- Original cataloging agency: OSt
- Transcribing agency: OSt
150 ## - HEADING--TOPICAL TERM
- Topical term or geographic name entry element: Microelectronics Fabrications
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: (OSt)31686: Campbell, Stephen A. 10815, The science & engineering of microelectronic fabrication, 1996