Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 61073

003 - CONTROL NUMBER IDENTIFIER

• control field: OSt

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20251118155747.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 251118|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: OSt
• Transcribing agency: OSt

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Semiconductor fabrications

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (OSt)17257: May, Gary. F. 42696, Fundamentals of semiconductor fabrications, 2004