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Micro electromechanical systems

By: Material type: TextTextLanguage: English Series: Micro/Nano technology series ; Volume.2Publication details: Singapore Springer 2018Description: xxiv; 659-1479pISBN:
  • 9789811059445
Subject(s): DDC classification:
  • 620.5068 HUA-M
Item type: Books and Monographs
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