Campbell, Stephen A. <br/><br/>
The science & engineering of microelectronic fabrication 

 - New York,  Oxford,  1996 
 - xv; 536p 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics Fabrications
<br/><br/><label>Dewey Class. No.: </label>621.38152    / C187T