Liu, Chang <br/><br/>
Foundations of MEMS 
Chang Liu 
 - 2nd ed 
 - Noida  Pearson education  2017 
 - 576p 
<br/><br/><label>ISBN: </label>88131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Foundations of MEMS
<br/><br/><label>Dewey Class. No.: </label>621.3 LI-F