Nithtianov, Stoyan <br/><br/>
Smart sensors and mems 

 - 2nd ed. 
 - UK  Woodhead publishing  2018 
 - xii; 592p  
 - Woodhead publishing series in electronic and optical materia .
<br/><br/><label>ISBN: </label>978008102055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Smart sensors and mems
<br/><br/><label>Dewey Class. No.: </label>681.2 NI-S