| 000 | 00598nam a2200217Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20260716145938.0 | ||
| 008 | 210209s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9789811059445 | ||
| 041 | _aeng | ||
| 082 | _a620.5068 HUA-M | ||
| 100 |
_aHuang, Qing- An ed _986353 |
||
| 245 | 0 | _aMicro electromechanical systems | |
| 260 |
_aSingapore _bSpringer _c2018 |
||
| 300 | _axxiv; 659-1479p | ||
| 440 |
_aMicro/Nano technology series _vVolume.2 _932836 |
||
| 650 |
_aMicroelectromechanical systems _989684 |
||
| 650 |
_a Market, surveys _989685 |
||
| 942 | _cBK | ||
| 999 |
_c200831 _d200831 |
||