| 000 | 00427nam a2200145Ia 4500 | ||
|---|---|---|---|
| 005 | 20250721105246.0 | ||
| 008 | 210219s9999||||xx |||||||||||||| ||und|| | ||
| 082 |
_a621.38152 _bC187T |
||
| 100 |
_aCampbell, Stephen A. _910815 |
||
| 245 | 4 | _aThe science & engineering of microelectronic fabrication | |
| 260 |
_aNew York, _bOxford, _c1996 |
||
| 300 | _axv; 536p | ||
| 650 |
_aMicroelectronics Fabrications _949163 |
||
| 942 | _cBK | ||
| 999 |
_c31686 _d31686 |
||