000 | 00399nam a2200145Ia 4500 | ||
---|---|---|---|
005 | 20240924121518.0 | ||
008 | 210219s9999||||xx |||||||||||||| ||und|| | ||
082 | _a621.38453 MA-F | ||
100 | _aMay Gary S | ||
245 | 0 |
_aFundamentals of semiconductor fabrications _cMay Gary S |
|
260 |
_aNew york _bJohn Wiley _c2005 |
||
300 | _a800p | ||
650 |
_aSemiconductor fabrications _939367 |
||
942 | _cBK | ||
999 |
_c47800 _d47800 |