000 00399nam a2200145Ia 4500
005 20240924121518.0
008 210219s9999||||xx |||||||||||||| ||und||
082 _a621.38453 MA-F
100 _aMay Gary S
245 0 _aFundamentals of semiconductor fabrications
_cMay Gary S
260 _aNew york
_bJohn Wiley
_c2005
300 _a800p
650 _aSemiconductor fabrications
_939367
942 _cBK
999 _c47800
_d47800