| 000 | 00388nam a2200145Ia 4500 | ||
|---|---|---|---|
| 005 | 20241007152503.0 | ||
| 008 | 210219s9999||||xx |||||||||||||| ||und|| | ||
| 082 | _a621.381BE-M | ||
| 100 |
_aBeeby Stephen _918241 |
||
| 245 | 0 |
_aMEMS mechanical sensors _cBeeby Stephen |
|
| 260 |
_aBoston _bArtech house _c2004 |
||
| 300 | _ax269p | ||
| 650 |
_aMEMS mechanical sensors _940236 |
||
| 942 | _cBK | ||
| 999 |
_c48920 _d48920 |
||