000 | 00450nam a2200157Ia 4500 | ||
---|---|---|---|
005 | 20240820104227.0 | ||
008 | 210219s9999||||xx |||||||||||||| ||und|| | ||
020 | _a9780070487093 | ||
082 | _a621.381 HS-M | ||
100 |
_aHsu, Tai-Ran _910909 |
||
245 | 0 |
_aMEMS and microsystems design and manufacture _c Tai-RanHsu |
|
260 |
_aChennai _bMcGraw Hill Education _c2019 |
||
300 | _axii; 426p | ||
650 |
_aMEMS and microsystems _936744 |
||
942 | _cBK | ||
999 |
_c57519 _d57519 |