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| 005 | 20240820104227.0 | ||
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| 020 | _a9780070487093 | ||
| 082 | _a621.381 HS-M | ||
| 100 |
_aHsu, Tai-Ran _910909 |
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| 245 | 0 |
_aMEMS and microsystems design and manufacture _c Tai-RanHsu |
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| 260 |
_aChennai _bMcGraw Hill Education _c2019 |
||
| 300 | _axii; 426p | ||
| 650 |
_aMEMS and microsystems _936744 |
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| 942 | _cBK | ||
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_c57519 _d57519 |
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