000 00450nam a2200157Ia 4500
005 20240820104227.0
008 210219s9999||||xx |||||||||||||| ||und||
020 _a9780070487093
082 _a621.381 HS-M
100 _aHsu, Tai-Ran
_910909
245 0 _aMEMS and microsystems design and manufacture
_c Tai-RanHsu
260 _aChennai
_bMcGraw Hill Education
_c2019
300 _axii; 426p
650 _aMEMS and microsystems
_936744
942 _cBK
999 _c57519
_d57519