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| 008 | 210219s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a88131764756 | ||
| 082 | _a621.3 LI-F | ||
| 100 | _aLiu, Chang | ||
| 245 | 0 |
_aFoundations of MEMS _c Chang Liu |
|
| 250 | _a2nd ed | ||
| 260 |
_aNoida _bPearson education _c2017 |
||
| 300 | _a576p | ||
| 650 |
_aFoundations of MEMS _936957 |
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| 942 | _cBK | ||
| 999 |
_c57662 _d57662 |
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