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| 005 | 20240823115530.0 | ||
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| 020 | _a978131660904 | ||
| 082 | _a621.381 JO-E | ||
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_aJones, Thomas B. _921468 |
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_aNenadic Nenad G _937013 |
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| 245 | 0 |
_aElectromechanics and MEMS _c Thomas B.Jones |
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| 260 |
_aNew Delhi _bCambridge university press _c2016 |
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| 300 | _axx; 559p | ||
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_aElectromechanics and MEMS _937014 |
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| 942 | _cBK | ||
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_c57698 _d57698 |
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