000 00361nam a22001457a 4500
005 20210427154627.0
008 210427b ||||| |||| 00| 0 eng d
041 _aeng
100 _aGhandhi Sorab K.
_916541
245 _aVLSI Fabrication Principles
_bSilicon and Gallium Arsenide
250 _a2
260 _bWILEY
_c1994
300 _aXXIV,834
942 _cBK
999 _c61648
_d61648