| 000 | 00491nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 210209s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a978008102055 | ||
| 082 | _a681.2 NI-S | ||
| 100 |
_aNithtianov, Stoyan _923832 |
||
| 245 | 0 | _aSmart sensors and mems | |
| 250 | _a2nd ed. | ||
| 260 |
_aUK _bWoodhead publishing _c2018 |
||
| 300 | _axii; 592p | ||
| 440 |
_aWoodhead publishing series in electronic and optical materia _933132 |
||
| 650 |
_aSmart sensors and mems _933133 |
||
| 942 | _cBK | ||
| 999 |
_c67934 _d67934 |
||